Multiple Choice
Which of the following forms of radiation have wavelengths shorter than the wavelength of ultraviolet light used in photolithography (two correct answers) :
A) electron beam radiation
B) infrared light
C) natural light
D) X-ray radiation
Correct Answer:
Verified
Correct Answer:
Verified
Q1: The aspect ratio in microsystem technology is
Q2: Bulk micromachining refers to a relatively deep
Q3: The LIGA process uses which of the
Q4: Photofabrication is the same process as photolithography.
Q6: Soft lithography refers to processes that use
Q7: The most common work material used in
Q8: Surface micromachining refers to a relatively shallow
Q9: Microsystem technology is concerned with products and
Q10: In the LIGA process, the letters LIGA
Q11: Which of the following are current applications