Exam 32: Microfabrication Technologies

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The aspect ratio in microsystem technology is best defined by which one of the following:

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B

Bulk micromachining refers to a relatively deep wet etching process into a single-crystal silicon substrate:

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True

The LIGA process uses which of the following radiation forms (two best answers):

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C , E

Photofabrication is the same process as photolithography.

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Which of the following forms of radiation have wavelengths shorter than the wavelength of ultraviolet light used in photolithography (two correct answers):

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Soft lithography refers to processes that use an elastomeric flat mold (similar to a rubber stamp) to create a pattern on a substrate surface:

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The most common work material used in microsystem technology is which one of the following:

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Surface micromachining refers to a relatively shallow layering process in the silicon substrate:

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Microsystem technology is concerned with products and product components whose feature sizes are measured in microns.A micron is equal to which one of the following:

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In the LIGA process, the letters LIGA stand for which one of the following:

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Which of the following are current applications of microsensor technology in modern automobiles (three best answers):

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The polymer used to make compact discs (CDs) and digital versatile discs (DVDs) is which one of the following:

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